S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, H. Toshiyoshi
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A mixed-signal analysis for tilted MEMS torsion mirror devices
We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.
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