基于内点算法的微盘谐振器设计优化

2018 IEEE Electron Devices Kolkata Conference (EDKCON) Pub Date : 2018-11-01 DOI:10.1109/EDKCON.2018.8770422

M. Sutagundar, B. G. Sheeparamatti, D. S. Jangamshetti

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引用次数: 0

摘要

利用内点法对MEMS圆盘谐振器进行了优化设计。尝试确定圆盘谐振器在特定谐振频率和质量因数下的最佳尺寸，并使运动阻力最小。该算法在MATLAB中实现。所得结果与自制装置进行了比较。与全波模拟器相比，所开发的方法可以提供更快的设计优化，从而显着减少设计时间。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design Optimization of Microdisk Resonator Using Interior Point Algorithm

This paper presents design optimization of MEMS disk resonator using interior point method. Determining the optimized dimensions of disk resonator for a particular resonance frequency and quality factor along with minimum possible motional resistance is attempted. The algorithm is implemented using MATLAB. The results obtained are compared with a fabricated device. The developed method can provide faster design optimization compared to full wave simulators resulting in significant reduction of design time.

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2018 IEEE Electron Devices Kolkata Conference (EDKCON)

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