铁电氧化铪锆的开关动力学测定畴壁速度和成核时间

X. Lyu, P. Shrestha, M. Si, Panni Wang, Junkang Li, K. Cheung, Shimeng Yu, P. Ye
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引用次数: 1

摘要

在这项工作中,我们首次通过研究铁电(FE)铪氧化锆(HZO)的开关动力学,实验确定了成核时间和畴壁(DW)速度。利用实验数据和仿真结果对开关动力学进行了定量研究。在高宽高比器件中,由于DW传播时间较长,或者由于泄漏电流辅助开关机构需要额外的隧道和捕获时间,介质界面层导致开关速度降低。
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Determination of Domain Wall Velocity and Nucleation Time by Switching Dynamics Studies of Ferroelectric Hafnium Zirconium Oxide
In this work, we present the first experimental determination of nucleation time and domain wall (DW) velocity by studying switching dynamics of ferroelectric (FE) hafnium zirconium oxide (HZO). Experimental data and simulation results were used to quantitatively study the switching dynamics. The switch speed is degraded in high aspect ratio devices due to the longer DW propagation time or with dielectric interfacial layer due to the required additional tunneling and trapping time by the leakage current assist switch mechanism.
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