高压铜烧结浆料用于大功率器件模贴

Hongyun Li, M. Yao, Li Ma, Xuelian Han, Fen Chen, D. Payne, A. Hutzler, Yan Liu
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引用次数: 0

摘要

高压铜(Cu)烧结浆料具有高剪切强度、高导热/导电性和高可靠性,可用于大功率器件的模贴应用。该浆料适用于不同的金属化,如金、银和铜。烧结压力为15 ~ 20mpa时,3mm × 3mm接头抗剪强度为> ~ 60MPa, 5mm × 5mm接头抗剪强度为> ~ 30MPa。经过1000小时(250°C)时效和3500次TCT(- 40°C-17 SOC),接头表现出优异的无分层性能。抗剪强度随TCT循环次数的增加而增加。这种铜烧结浆料可用于点胶和印刷应用。为了使模具和衬底之间牢固结合,烧结过程需要N2、H2、甲酸和真空气氛。
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Pressure Copper Sintering Paste for High-Power Device Die-Attach Applications
Pressure copper (Cu) sintering paste with high shear strength, high thermal/electrical conductivity, and positive reliability was developed for high-power device die-attach applications. The paste is suitable for different metallizations, e.g., Au, Ag, and Cu. When sintering with 15-20MPa pressure, > 60MPa shear strength was achieved for 3mm x 3mm joints and> 30MPa for 5mm x 5mm joints. After more than 1000 hours (250°C) aging and 3500 cycles TCT (−40°C-17 SOC), the joints exhibited excellent performance without delamination. Shear strength increased with increased TCT cycles. This Cu sintering paste can be used for both dispensing and printing applications. For strong bonding between die and substrate, the sintering process requires N2, H2, formic acid, and a vacuum atmosphere.
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