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2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)最新文献

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High Density Interconnect (HDI) Socket Flow & Waprage Prediction & Characterization 高密度互连(HDI)套接字流量和波动预测与表征
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013256
R. Ooi, F. Costa, Sam Hsieh, E. Chiu, Wendy Xu, Dave Yu, Darwin Fan, Allen Cheng, Andrew Gattuso, Yongfu Wang, Currey Hsieh, Jeffery Toran, J. Thompson, Pierre-Louis Toussaint, Ryan Curry, L. W. Keat, R. Kulterman, H. Fu
High density interconnect (HDI) sockets for CPU, GPU etc. is trending to larger form factor as the interconnect counts approach the realm of 10,000. One of the key bottleneck in HDI socket development is the ability of flow and warpage simulation techniques to reduce the design cycle time. The focus of this project is to explore novel simulation techniques to speed up the flow prediction part of simulation and reduce physical experiments needed to improve time to market (TTM) cycle of HDI sockets. The main challenge in HDI socket simulation is: (1) complexity of fibre-filled liquid crystal polymer (LCP) material properties and (2) complex but repetitive pin holes in the core pin region of the HDI socket. This takes up ~90% of the simulation time and slows down the design cycle. In this project, focus was put in to simplify the repetitive pin hole structure. The pin hole arrays are represented by equivalent flow resistant model and produce similar flow patterns in shorter time. In order to achieve this, three (3) LCP materials grades with known properties were provided by project partner Celanese. Test vehicle (TV) of HDI sockets were then build by socket fabrication partners using the LCP material provided. Room temp (RT) warpage of the socket were measured, together with short-shot samples collected for simulation flow and warpage prediction validation. The repetitive pin hole arrays of the HDI sockets are represented by equivalent flow resistant model. The predicted flow patterns from simulation are in good agreement with short-shot samples. The warpage shape and magnitude predictions are also in good agreement for 2 out of 3 material grades. It was later found out that the odd material that has different warpage has a different matrix (resin) LCP property. Solving time improvement ranging between 3.6x and 35x times were demonstrated in the proof of concept. The project outcome allows faster flow and warpage simulation for HDI socket design and development. The utilization of numerical predictions will be greatly increased, reduced material cost used for design prototyping and injection mold chase tape outs. Simulation software partners from the project will develop further on the demo beta versions for eventual product releases.
CPU、GPU等的高密度互连(HDI)插座随着互连数量接近10000个,正趋向于更大的尺寸。HDI套接字开发的关键瓶颈之一是流动和翘曲模拟技术的能力,以减少设计周期时间。该项目的重点是探索新的模拟技术,以加快模拟的流量预测部分,减少物理实验,以提高HDI插座的上市时间(TTM)周期。HDI插座仿真面临的主要挑战是:(1)纤维填充液晶聚合物(LCP)材料特性的复杂性;(2)HDI插座核心引脚区域的引脚孔复杂且重复。这占用了约90%的仿真时间,并减慢了设计周期。在这个项目中,重点是简化重复的销孔结构。用等效流阻模型表示针孔阵列,在较短时间内产生相似的流态。为了实现这一目标,项目合作伙伴塞拉尼斯提供了三种已知性能的LCP材料等级。然后由插座制造合作伙伴使用提供的LCP材料建造HDI插座的测试车辆(TV)。测量了插座的室温(RT)翘曲,并收集了短片样品用于模拟流动和翘曲预测验证。HDI插座的重复引脚孔阵列用等效流阻模型表示。模拟预测的流型与短样本吻合较好。翘曲形状和大小的预测也很好地符合2 / 3的材料等级。后来发现,具有不同翘曲量的奇数材料具有不同的基体(树脂)LCP特性。在概念验证中证明了解决时间的改善范围在3.6倍到35倍之间。项目结果允许更快的流动和翘曲模拟HDI插座设计和开发。数值预测的利用率将大大提高,降低材料成本,用于设计原型和注塑模具追逐胶带。该项目的模拟软件合作伙伴将进一步开发最终产品版本的演示测试版本。
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引用次数: 0
Board-level Reliability Performance Comparison of Thin and Thick Ni plating ENEPIG Laminate LGA and BGA Packages 薄、厚镀Ni ENEPIG层压板LGA和BGA封装的板级可靠性性能比较
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013134
Seok–Phyo Tchun, Joo–Yeop Kim, A. Raj
In the electronic packaging industry, for the past few decades, ENEPIG(Electroless Nickel Electroless Palladium Immersion Gold) plating method has been already widely used for substrates of many different LGA and BGA packages. However, because of chronic quality issues of laminate manufacturing process such as discoloration and corrosion induced from very long process time of Nickel layer plating process, there is a strong demand from laminate substrate suppliers of changing the Nickel layer thickness range from thick 3∼8um to thin 0.08∼0.2um, In this study, we tried to verify the board level reliability performance of Thin Nickel plating ENEPIG laminate packages, comparing with current Thick Nickel plating ENEPIG laminate packages, also compared the performance between LGA and BGA packages.
在电子封装行业,在过去的几十年里,ENEPIG(化学镀镍化学镀钯浸金)方法已经广泛应用于许多不同的LGA和BGA封装的基板。然而,由于层压板制造过程中存在长期的质量问题,例如镀镍层工艺的长时间工艺引起的变色和腐蚀,层压板基板供应商强烈要求将镍层厚度范围从厚3 ~ 8um改为薄0.08 ~ 0.2um。在本研究中,我们试图验证薄镀镍ENEPIG层压板封装的板级可靠性性能。比较了目前厚镀镍ENEPIG层压板封装的性能,并比较了LGA和BGA封装的性能。
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引用次数: 0
Laser-Induced Forward Transfer for Assembly of Silicon Micro-Chiplets 硅微晶片组装的激光诱导正向转移
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013279
H. K. Kannojia, G. Van Steenberge
The semiconductor industry can no longer count on monolithic integration to accomplish the economic benefits of the previous era. Now, new packaging solutions are being adopted to achieve the commercial advantages that were previously met with silicon scaling. The role of heterogeneous integration, especially micro-chiplets, is pivotal in this new era. Several techniques are being investigated to allow for massive but still precise assembly of small semiconductor chiplets, including contact transfer printing, fluidic assembly, and laser-induced forward-transfer (LIFT) printing. In addition to very high transfer rates, laser-based mass transfer offers the advantages of being truly selective, and extremely flexible in terms of dimensions and materials. This study presents a combined approach for micro-chiplet preparation and assembly, with a systematic investigation into the transfer accuracy of 200×200 µm2 Si micro-chiplets as a function of various experimental conditions which would be useful for heterogeneous integration of different micro-chiplets in systems-in-package applications.
半导体行业不能再指望单片集成来实现上一个时代的经济效益。现在,新的封装解决方案正在被采用,以实现以前与硅缩放满足的商业优势。在这个新时代,异构集成,特别是微芯片的作用至关重要。目前正在研究几种技术,以实现大规模但仍然精确的小型半导体芯片组装,包括接触转移印刷、流体组装和激光诱导正向转移(LIFT)印刷。除了非常高的传递速率,基于激光的传质提供了真正选择性的优势,并且在尺寸和材料方面非常灵活。本研究提出了一种微晶片制备和组装的组合方法,系统地研究了200×200µm2 Si微晶片的传输精度作为各种实验条件的函数,这将有助于系统级封装应用中不同微晶片的异构集成。
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引用次数: 0
Fatigue performance of Cu/Sn–3.0Ag–0.5Cu/Cu solder joints at different current densities Cu/ Sn-3.0Ag-0.5Cu /Cu焊点在不同电流密度下的疲劳性能
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013209
Long-geng Liu, Bo Wang, Wangyun Li, Yu-bing Gong, K. Pan
In this study, the low cycle shear fatigue performance and fracture behavior of microscale ball grid array (BGA) structure Cu/Sn–3.0Ag–0.5Cu/Cu solder joints with various shear amplitudes were systematically investigated at different current densities by experimental, theoretical methods and finite element analysis. The experimental results showed that the fatigue life of the solder joint decreased with increasing shear amplitude and current density. The descent rate of fatigue life decreased with increasing shear amplitude at the same current density. Moreover, the deterioration of current stressing on the fatigue life of the solder joint was more serious at the lower shear amplitude. In addition, with increasing current density, the solder joint fracture position transitioned from the solder matrix to the solder/IMC layer interface, and the shape of the fracture path shifted from arc-shape to flat-shape.
本文通过实验、理论和有限元分析等方法,系统研究了不同剪切幅值的微尺度球栅阵列(BGA)结构Cu/ Sn-3.0Ag-0.5Cu /Cu焊点在不同电流密度下的低周剪切疲劳性能和断裂行为。实验结果表明,随着剪切幅值和电流密度的增大,焊点的疲劳寿命减小。在相同电流密度下,随剪切幅值的增大,疲劳寿命下降速率减小。在较低剪切幅值下,电流应力的恶化对焊点疲劳寿命的影响更为严重。此外,随着电流密度的增大,焊点断口位置由钎料基体过渡到钎料/IMC层界面,断口路径由圆弧型转变为平面型。
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引用次数: 0
Influence of Current Density on Wire Bond Lifetime in Active Power Cycling Test 有功功率循环试验中电流密度对线键寿命的影响
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013275
Marcel Sippel, R. Schmidt, M. Käsbauer, M. Sprenger, A. Hensel, J. Franke
The top side interconnection of a power semiconductor by aluminum heavy wire bonds is one key point of failure during operation. State of the art lifetime models mostly focus on the operating conditions of the power module. They can be used to correlate lifetime testing data with application conditions but cannot cover the wide range of design parameters relevant for the development of a power module. An extensive power cycling study was conducted in order to evaluate the additional stress induced in the bond interface on the chip by the wire bond loop, with the main focus being on the load current in the wire bond. A strong correlation between the power loss density in the bond loop and the tested lifetime was found over a wide range of load currents. Additional influence factors, such as the number of stitches, were identified in this study. This data can be used to expand existing lifetime models and make them more relevant for power module design.
功率半导体的铝重线键顶侧互连是运行过程中的一个关键故障点。目前的寿命模型主要关注电源模块的工作状态。它们可用于将寿命测试数据与应用条件相关联,但不能涵盖与功率模块开发相关的广泛设计参数。为了评估导线键合环路在芯片上的键合界面中引起的额外应力,进行了广泛的功率循环研究,主要关注的是导线键合中的负载电流。在很宽的负载电流范围内,键合回路中的功率损耗密度与测试寿命之间存在很强的相关性。本研究还确定了其他影响因素,如缝线数。这些数据可用于扩展现有的寿命模型,并使其与功率模块设计更相关。
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引用次数: 1
Failure Analysis Case Study on Covalent Wafer bonding Delamination 共价晶圆键合分层失效分析案例研究
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013251
L. Tang, J. Woo, M. Chew, Kenneth Lee, Ting Ta Chi
Covalent wafer-to-wafer bonding is one of the package research fields that requires high quality SiO2 interface from 2 sides of Si wafers. Failure analysis on adhesion problem wafers is to understand the root cause of failures for process enhancement. In this paper, three different sample preparation methods have been used to analyze a covalent wafer-to-wafer bonding delamination issue that was captured in SAM. One simple and useful sample preparation method has been introduced in the paper. With this method, further analysis work can be carried out to provide full information of the defects.
共价晶圆键合是对硅晶圆两侧高质量SiO2界面要求较高的封装研究领域之一。对粘着问题晶圆进行失效分析是为了了解失效的根本原因,从而提高工艺。本文采用了三种不同的样品制备方法来分析在SAM中捕获的共价晶圆到晶圆键的分层问题。本文介绍了一种简单实用的样品制备方法。使用这种方法,可以进行进一步的分析工作,以提供缺陷的完整信息。
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引用次数: 0
Comprehensive Study on Die Shift with Ultra-Large Embedded Multi-Die Wafer Level Packaging 超大嵌入式多晶圆级封装模移的综合研究
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013110
W. Seit, S. Chong, S. Lim, B. Sajay
Embedded wafer level packaging technology (eWLP) has gained interest for promoting multi -die packages in small volume with high performance [1]. Several factors such as thermal expansion, mold compound shrinkage and mold-flow will affects the die shift [2]. The eWLP package is getting larger and larger to accommodate multi -dies to further increase the functions of the package. Die with different sizes may experience different die shift magnitude as bigger die has stronger adhesion as compare to die with smaller dimension. Stronger adhesion helps to resist the impact of mold flow during the compression molding process. Ultra-large package indicated that the volume of mold compound inside the package is much higher than those packages with smaller dimension. As such, the impact of mold shrinkage and thermal expansion is greater for ultra large eWLP package. In this paper, we will evaluate the die shift for various die sizes for an ultra-large package of 32.05×26.7mm. And hence a method of optimizing the die shift for the various die size in an ultra-large package is developed in this study. The dies will be picked and placed on a taped carrier and then to be molded. After molding, each die position is measured by using Nikon Confocal tool. The die shift is then determined by subtracting the die position with the designated position. Die shift will be compensated based on graphical x-y plot. The outcome of the die shift will be analysed after compensation and fine tune the die shift if necessary. In summary, we had demonstrated the die shift is less than 15um for 3 different die sizes in an ultra-large eWLP package.
嵌入式晶圆级封装技术(eWLP)在小体积、高性能的多晶圆封装领域得到了广泛的关注[1]。热膨胀、模具复合收缩、模流等因素都会影响模具移位[2]。eWLP封装正变得越来越大,以适应多芯片,进一步增加封装的功能。不同尺寸的模具会有不同的模移幅度,因为较大的模具附着力比较小尺寸的模具强。更强的附着力有助于在压缩成型过程中抵抗模流的影响。超大尺寸的封装意味着封装内模具复合材料的体积要比小尺寸的封装大得多。因此,对于超大型eWLP封装,模具收缩和热膨胀的影响更大。在本文中,我们将评估各种尺寸的模具移位为超大型封装32.05×26.7mm。在此基础上,提出了一种针对超大封装中不同尺寸的模移优化方法。模具将被挑选并放置在胶带载体上,然后进行模塑。成型后,使用尼康共焦工具测量每个模具位置。然后通过用指定位置减去模具位置来确定模具位移。模具移位将根据图形x-y图进行补偿。在补偿后对移模结果进行分析,必要时对移模进行微调。总之,我们已经证明了在超大型eWLP封装中,对于3种不同的模具尺寸,模具位移小于15um。
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引用次数: 0
Delamination behavior study of AF4 parylene thin films on Si and SiO2 substrates by scratch testing 用划痕试验研究AF4聚对二甲苯薄膜在Si和SiO2衬底上的分层行为
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013185
T. Sinani, G. Miskovic
In this work delamination behavior $1,6 mumathrm{m}$ thin AF4 coatings on silicon (Si) and glass (SiO2) substrates were tested by scratch testing. The coatings were deposited by vapor deposition polymerization (VDP) technique on untreated and polished 8-inch Si and SiO2 wafers, with root mean square (RMS) roughness of 4 and 2 nm, respectively. Scratch tests were performed in displacement and load controlled mode, where scratch depths were varied from 1 to $1,6 mumathrm{m}$. The indentation loads and subsequently depths, were varied to observe different delamination features over the penetration depth at the substrate-coating interface. Additionally, the scratches were observed in-situ with scanning electron microscopy (SEM) to better understand the changes in lateral force during the test. The results showed that cohesive failure in AF4 happens before adhesive failure at indentation depths down to $1,4 mumathrm{m}$, At $1,4 mumathrm{m}$ depth we can observe first adhesive failure features on the AF4 coating - SiO2 substrate interface. This shows that the AF4 coating on the SiO2 substrate has a slightly lower adhesion than on the Si substrate. The adhesion failures on both samples start to occur at scratches near the AF4-substrate interface, without chipping on the sides. The results also showed that if the scratch depth is not near the AF4-substrate, only the cohesive failure in AF4 can be seen, which indicates very good adhesion for both samples.
在这个工作分层行为1美元,6 μ mathrm {m} $薄AF4涂料在硅(Si)和玻璃(二氧化硅)基质被划痕测试测试。通过气相沉积聚合(VDP)技术在未经处理和抛光的8英寸Si和SiO2晶圆上沉积涂层,其均方根(RMS)粗糙度分别为4和2 nm。在位移和载荷控制模式下进行划痕试验,划痕深度从1到$1,6 mumathrm{m}$。通过改变压痕载荷和随后的深度,观察基底-涂层界面随着渗透深度的变化而出现的不同分层特征。此外,通过扫描电子显微镜(SEM)对划痕进行了现场观察,以更好地了解测试过程中侧向力的变化。结果表明:在压痕深度为$1,4 mumathrm{m}$时,AF4的内聚破坏先于粘结破坏发生;在深度为$1,4 mumathrm{m}$时,AF4涂层- SiO2基体界面出现了粘结破坏特征;这表明,AF4涂层在SiO2基体上的附着力略低于在Si基体上。两种样品的粘附失效开始发生在af4 -衬底界面附近的划痕处,而两侧没有碎裂。结果还表明,当划痕深度不在AF4基体附近时,只能看到AF4的粘结破坏,说明两种样品的粘附性都很好。
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引用次数: 0
Fast Design of a Multilayer Interdigital Filter Exploiting Trust Region Aggressive Space Mapping 利用信任域侵略性空间映射的多层数字间滤波器的快速设计
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013086
Xiaoming Wang, Haojie Chen, Yang Yang, Lin Cao, Yufeng Jin
Multilayer microstrip interdigital filter has become a research hotspot with the development of miniaturization and high integration. Many electromagnetic optimization methods have been developed with the increasing complexity and design difficulty of multilayer interdigital filters. Aggressive Space Mapping (ASM) algorithm has poor convergence and Implicit Spatial Mapping algorithm is limited to modeling structures with equivalent circuit models in ADS. Hence the improved Trust Region Aggressive Space Mapping (TRASM) algorithm is adopted to map between the coarse and fine models in this paper, where the coarse model is the coupling matrix and the fine model is the model in HFSS. Modal Vector Fitting (MVF) algorithm is used to get the coupling matrix, which enhances the uniqueness of the extraction step. This paper proposes a four-order and four-layer interdigital filter with a pass band of 8–9 GHz and an in-band return loss of 20.34 dB. The TRASM method based on MVF can complete the optimization in about 90 minutes with only two iterations, which is better than that of ASM and full- wave electromagnetic simulation. The innovative algorithm with efficient optimization proposed in this paper will be applied in electromagnetic optimization of multilayer filters extensively and improve the accuracy and simulation efficiency significantly.
随着微型化和高集成化的发展,多层微带数字间滤波器已成为研究热点。随着多层数字间滤波器的复杂性和设计难度的增加,人们开发了许多电磁优化方法。ASM (Aggressive Space Mapping)算法收敛性差,且隐式空间映射算法在ADS中仅限于用等效电路模型对结构进行建模,因此本文采用改进的Trust Region Aggressive Space Mapping (TRASM)算法在粗模型和精模型之间进行映射,其中粗模型为耦合矩阵,精模型为HFSS中的模型。采用模态向量拟合(Modal Vector Fitting, MVF)算法得到耦合矩阵,增强了提取步骤的唯一性。本文提出了一种四阶四层数字间滤波器,其通频带为8 - 9ghz,带内回波损耗为20.34 dB。基于MVF的TRASM方法只需两次迭代即可在90分钟左右完成优化,优于ASM和全波电磁仿真。本文提出的高效优化的创新算法将广泛应用于多层滤波器的电磁优化,显著提高精度和仿真效率。
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引用次数: 0
The effect of cyclic thermal loading rate on the mechanical behavior of micro-bumps in CoWoS package 循环热加载速率对CoWoS封装微凸点力学行为的影响
Pub Date : 2022-12-07 DOI: 10.1109/EPTC56328.2022.10013194
H. Bao, Tianhan Liu, Minjie Ning, Weiping Du, Yufeng Liu, Zongbei Dai
Micro-bumps are one kind of the CoWoS package structures. Finite element analysis (FEA) simulation was used to more accurately investigate micro-bumps mechanical behaviour (e.g. stress-strain state, lifetime prediction) at different cyclic thermal loading rates (mimic the thermal cycling and thermal shock in JEDEC JESD22 A106B/A104E conditions). Considering the difference in thermal expansion coefficients of each material in the CoWoS structure, the material properties of each structure were fed into the simulation. The results showed that the cyclic thermal loading rate influences the maximum equivalent strain, which is larger at slower thermal loading rates. However, the maximum equivalent stress and the maximum strain energy density are larger at faster thermal loads. In addition, the regions with the maximum equivalent stress and the maximum strain energy density normally are located closed to the most distal part of the micro-bumps. Finally, this paper also presents a lifetime prediction for micro-bumps by Engelmaier model, which could be a reference only. The lifetime prediction indicated that faster thermal loading rates lead to micro-bumps greater stress-strain concentration, which in turn reduce lifetime.
微凸点是CoWoS包结构的一种。采用有限元分析(FEA)模拟,更准确地研究了不同循环热加载速率下微凸点的力学行为(如应力应变状态、寿命预测)(模拟JEDEC JESD22 A106B/A104E条件下的热循环和热冲击)。考虑到cocos结构中每种材料的热膨胀系数的差异,将每种结构的材料性能输入到模拟中。结果表明:循环热加载速率对最大等效应变有影响,且在较慢的热加载速率下最大等效应变较大;然而,在更快的热载荷下,最大等效应力和最大应变能密度更大。此外,最大等效应力和最大应变能密度的区域通常位于微凸起的最远端。最后,本文还提出了用Engelmaier模型预测微碰撞的寿命,仅供参考。寿命预测表明,更快的热加载速率会导致微凸起,应力应变集中程度更高,从而降低寿命。
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引用次数: 0
期刊
2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)
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