液体传感器探头采用完全反射在自由边缘的剪切水平模式表面声波

T. Nomura, A. Saitoh, T. Miyazaki
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引用次数: 1

摘要

提出了一种基于SH-SAW器件的边缘反射式液体SAW传感器探头及其初步实现系统。利用36/spl度/YX LiTaO/sub - 3/衬底进行的实验表明,在垂直边缘反射的SH-SAW波在液体中随传播长度成比例衰减。此外,它还表明,在液体和边缘之间的界面处反射波的振幅与液体的粘度和密度的乘积的平方根成正比。研究还表明,光栅波导消除了SSBW,从而便于电特性的测量。最后,提出了一种适用于反射式SH-SAW传感器的初步系统结构。
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Liquid sensor probe using complete reflection at free edge of shear horizontal mode surface acoustic wave
An edge-reflecting liquid SAW sensor probe based on the SH-SAW device and a tentative implementation system for the sensor probe has been proposed. Experiments using the 36/spl deg/YX LiTaO/sub 3/ substrate have shown that the SH-SAW wave, which is reflected at the perpendicular edge, attenuates in the liquid in proportion to the propagation length. Moreover, it has shown that the amplitude of the reflected wave at the interface between the liquid and the edge is proportional to the square root of the product of the viscosity and density of the liquid. It has also been shown that the grating wave-guide eliminates SSBW, thereby facilitating the measurement of the electrical characteristics. Finally, a tentative system configuration suitable for the reflecting SH-SAW sensor was proposed.
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