在eprom中构建可靠性

28th Annual Proceedings on Reliability Physics Symposium Pub Date : 1990-03-27 DOI:10.1109/RELPHY.1990.66053

D. Baglee, Lynn Nannemann, C. Huang

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引用次数: 16

摘要

考虑了在大批量环境中实现稳定、可靠工艺的四个方面:(a)制造环境中的工艺能力;(b)生产控制;(c)过程相互作用的评价;(d)过程监测。对这些方面进行了讨论，并对其应用提出了建议。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Building reliability into EPROMs

Four areas for achieving a stable, reliable process in a high volume environment are considered: (a) process capability in a manufacturing environment; (b) manufacturing control; (c) assessment of process interactions; (d) process monitoring. These areas are discussed, and suggestions for their application are made.<>

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28th Annual Proceedings on Reliability Physics Symposium

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