功率器件合金模具在热循环过程中的热阻退化

J. Naderman, F. W. Ragay, D. de Vries, A. van Eck, J. Van de Water
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引用次数: 1

摘要

背面扫描声学断层扫描(SCAT)图像与合金形貌(横截面)和成分数据(化学计量)相关联,以模拟表面贴装器件封装功率ic的/spl Theta//sub JC/退化作为温度循环范围的函数。我们发现,适当设置模具附加工艺可以抑制针状的Cu/sub 3/Sn,而有利于大致球形的Cu/sub 6/Sn/sub 5/。在不同温度波动的热循环应力测试中,我们得到了/spl Theta//sub JC/的退化,这是一个可以用Coffin-Manson定律描述的加速因子。对于采用HSOP封装的新改进的贴模工艺设置,式中拟合参数q为9.35。最后,基于正态分布方法的最大/spl Theta//sub JC/退化为0.34 K/W,寿命为12年。当客户在使用寿命结束时要求最大/spl Theta//sub JC/为2.0 K/W时,可以保证使用50年。
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Thermal resistance degradation of alloy die attached power devices during thermal cycling
Backside scanning acoustic tomography (SCAT) images have been correlated to alloy morphology (cross-section) and composition data (stochiometry) to model the /spl Theta//sub JC/ degradation for surface mounted device packaged power ICs as a function of the temperature cycling range. We find that an appropriate setting of the die attach process can suppress needle-shaped Cu/sub 3/Sn in favor of roughly spheroidal Cu/sub 6/Sn/sub 5/. We derived from the degradation of /spl Theta//sub JC/ during thermal cycling stress tests with different temperature swings, an acceleration factor which can be described by the Coffin-Manson law. The fitting parameter q in this formula is 9.35 for the new improved setting of the die attach process when the HSOP package is used. Finally, a maximum /spl Theta//sub JC/ degradation of 0.34 K/W based on the normal distribution approach results in a lifetime of 12 years. When a customer requires a maximum /spl Theta//sub JC/ of 2.0 K/W at the end of life, 50 years can be guaranteed.
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