{"title":"金刚石超快激光加工","authors":"P. Salter, M. Booth","doi":"10.1117/12.2040384","DOIUrl":null,"url":null,"abstract":"Ultrashort pulsed lasers are used to fabricate 3D structures in single crystal CVD diamond. The interaction of the laser with diamond lattice leads to a permanent structural modification, which is highly localized at the focus. Severe spherical aberrations compromise fabrication precision below the diamond surface. We implement adaptive aberration compensation to ensure optimum fabrication performance. The nature of the structural modification is analysed for both surface and subsurface laser fabrications.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"88 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Ultrafast laser processing of diamond\",\"authors\":\"P. Salter, M. Booth\",\"doi\":\"10.1117/12.2040384\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ultrashort pulsed lasers are used to fabricate 3D structures in single crystal CVD diamond. The interaction of the laser with diamond lattice leads to a permanent structural modification, which is highly localized at the focus. Severe spherical aberrations compromise fabrication precision below the diamond surface. We implement adaptive aberration compensation to ensure optimum fabrication performance. The nature of the structural modification is analysed for both surface and subsurface laser fabrications.\",\"PeriodicalId\":395835,\"journal\":{\"name\":\"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components\",\"volume\":\"88 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2040384\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2040384","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ultrashort pulsed lasers are used to fabricate 3D structures in single crystal CVD diamond. The interaction of the laser with diamond lattice leads to a permanent structural modification, which is highly localized at the focus. Severe spherical aberrations compromise fabrication precision below the diamond surface. We implement adaptive aberration compensation to ensure optimum fabrication performance. The nature of the structural modification is analysed for both surface and subsurface laser fabrications.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
