采用悬臂式金属触点的高性能砷化镓肖特基势垒二极管

D. Boccon-Gibod, P. Harrop
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引用次数: 5

摘要

设计了一种原始结构的平面肖特基二极管,在有源二极管区域和欧姆触点之间采用悬浮触点,提高了器件的截止频率,使器件成本低,可靠性高。自对准技术被用来定义有源二极管的区域。截止频率超过2 000 GHz的测量和串联电阻约1.3欧姆。该二极管已用于波导和微带混频器结构,并将介绍转换损耗的测量。
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High Performance GaAs Schottky Barrier Diodes using a Cantilevered Metal Contact
A planar Schottky diode of original structure has been developed using a suspended contact between the active diode area and the ohmic contact to increase the device cut-off frequency and make a low cost reliable device. Self-alignment techniques were used to define the active diode area. Cut-off frequencies in excess of 2 000 GHz have been measured and series resistances around 1.3 ohms. The diodes have been used in waveguide and microstrip mixer structures and conversion loss measurements will be presented.
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