在深亚微米CMOS技术模拟应用的高耐压ESD设计

Chung-Hui Chen, Yean-Kuen Fang, Chien-Chun Tsai, S. Tu, Mark Chen, Mi-Chang Chang
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引用次数: 2

摘要

提出了一种新的高容压ESD设计方案,采用一个正偏P+/ n阱二极管串联在一个堆叠的NMOS上,以减小总电容并保持高ESD性能,并采用0.18 /spl mu/m CMOS技术实现。测量到的HVT引脚HBM和MM ESD电平分别超过6 kV和550 V,而测量到的输入电容仅为250 fF。
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High voltage tolerant ESD design for analog applications in deep submicron CMOS technologies
A new high voltage tolerant (HVT) ESD design adopts one forward biased P+/N-well diode in series of one stacked NMOS to reduce the total capacitance and maintain the high ESD performance is proposed and implemented by 0.18 /spl mu/m CMOS technologies. The measured HBM and MM ESD levels of the HVT pin exceed 6 kV and 550 V, respectively, while the measured input capacitance is only 250 fF.
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