应变条件下柔性a-IGZO TFT的电稳定性

M. Hasan, M. Billah, Jin Jang
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引用次数: 1

摘要

本文报道了拉伸应变对柔性a-In-Ga-Z-O (a-IGZO)薄膜晶体管(TFT)电性能的影响。在a-IGZO TFTs中,Vgs = 20 V和Vds = 0 V的正偏置应力(PBS)测量显示,由于负电荷的捕获,可能是电子捕获,正转移位移。我们观察到,在3.6K秒的应力作用下,弯曲半径为2mm的拉伸应变TFT比平坦条件TFT (ΔVth (V) ~1.5 V)表现出ΔVTh (V) ~2.3 V的正位移。结果表明,当费米能级被应变几何的PBS向下移动时,更多的电荷被困在栅极绝缘体/a-IGZO界面上。
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Electrical stability of flexible a-IGZO TFT under strained condition
We report the effect of tensile strain on the electrical performance of flexible a-In-Ga-Z-O (a-IGZO) thin-film transistor (TFT). Positive bias stress (PBS) measurement with Vgs = 20 V and Vds = 0 V in a-IGZO TFTs show positive transfer shift due to the trapping of negative charges, likely electron trapping. We observed that tensile strained TFT with 2 mm bending radius exhibits a positive ΔVTh (V) ~2.3 V shift compared to flat condition TFT (ΔVth (V) ~1.5 V) after 3.6K seconds stress. It clearly revels that more charges are trapped at the gate insulator/a-IGZO interface when the Fermi level is shifted downward by PBS with strained geometry.
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