{"title":"用微锯齿形连续波激光扫描在轧制柔性衬底上生长单晶条纹","authors":"W. Yeh, S. Moriyama","doi":"10.1109/AM-FPD.2016.7543657","DOIUrl":null,"url":null,"abstract":"A chevron-shaped cw-laser-induced single crystal growth in Si thin-film on rolled flexible substrate was proposed and demonstrated for roll-to-roll fabrication process. The substrate was bendable thin borosilicate glass with sputter deposited SiO2 and Si film, and was attached onto a rotating roll which rotated at a circumferential speed of 0.013 m/s during chevron-shaped cw-laser irradiation. Single grain growth was observed along laser scan direction.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Growth of single crystal stripe in Si film on rolled flexible substrate by micro-chevron-shaped cw laser scanning\",\"authors\":\"W. Yeh, S. Moriyama\",\"doi\":\"10.1109/AM-FPD.2016.7543657\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A chevron-shaped cw-laser-induced single crystal growth in Si thin-film on rolled flexible substrate was proposed and demonstrated for roll-to-roll fabrication process. The substrate was bendable thin borosilicate glass with sputter deposited SiO2 and Si film, and was attached onto a rotating roll which rotated at a circumferential speed of 0.013 m/s during chevron-shaped cw-laser irradiation. Single grain growth was observed along laser scan direction.\",\"PeriodicalId\":422453,\"journal\":{\"name\":\"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-07-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/AM-FPD.2016.7543657\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AM-FPD.2016.7543657","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Growth of single crystal stripe in Si film on rolled flexible substrate by micro-chevron-shaped cw laser scanning
A chevron-shaped cw-laser-induced single crystal growth in Si thin-film on rolled flexible substrate was proposed and demonstrated for roll-to-roll fabrication process. The substrate was bendable thin borosilicate glass with sputter deposited SiO2 and Si film, and was attached onto a rotating roll which rotated at a circumferential speed of 0.013 m/s during chevron-shaped cw-laser irradiation. Single grain growth was observed along laser scan direction.