{"title":"用光学相位步进算法对干涉显微镜获得的图像进行薄膜形态学评价","authors":"V. Sarmiento, M. Asmad, J. I. Choque, G. Baldwin","doi":"10.1117/12.2025981","DOIUrl":null,"url":null,"abstract":"The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.","PeriodicalId":135913,"journal":{"name":"Iberoamerican Meeting of Optics and the Latin American Meeting of Optics, Lasers and Their Applications","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy\",\"authors\":\"V. Sarmiento, M. Asmad, J. I. Choque, G. Baldwin\",\"doi\":\"10.1117/12.2025981\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.\",\"PeriodicalId\":135913,\"journal\":{\"name\":\"Iberoamerican Meeting of Optics and the Latin American Meeting of Optics, Lasers and Their Applications\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Iberoamerican Meeting of Optics and the Latin American Meeting of Optics, Lasers and Their Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2025981\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Iberoamerican Meeting of Optics and the Latin American Meeting of Optics, Lasers and Their Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2025981","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy
The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.
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