基于堆叠层的大尺寸红外回流微透镜

2010 International Conference on Optical MEMS and Nanophotonics Pub Date : 2010-12-17 DOI:10.1109/OMEMS.2010.5672169

Takuro Aonuma, S. Kumagai, M. Sasaki

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引用次数: 1

摘要

结合紫外光固化工艺制备了大尺寸(~ mm)回流微透镜。下面堆叠的抗蚀剂层可以帮助光抗蚀剂在回流过程中产生凸抛物线形状的材料运动。叠层厚度呈明显的线性关系。采用直径1.5mm的微透镜确认红外成像性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Large-size infrared reflow microlens based on stacked layers

Large-size (∼mm) reflow microlens is fabricated combining with UV curing process. Underlying stacked resist layers can assist the material movement of the photoresist in the reflow process generating the convex parabola shape. Stacking thickness shows the clear linearity. Infrared imaging performance is confirmed using 1.5mm-diameter microlens.

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2010 International Conference on Optical MEMS and Nanophotonics

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