同时测量电子化合物的温度和膨胀

2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium Pub Date : 2011-03-20 DOI:10.1109/STHERM.2011.5767201

M. Fontaine, E. Joubert, O. Latry, C. Gauthier, C. Regard, H. Polaert, P. Eudeline, M. Ketata

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引用次数: 2

摘要

本文提出了一种测量微电子化合物物理值的新方法。实际上，光学系统被用来同时量化一个部件的表面温度和膨胀。这是用迈克尔逊干涉仪完成的。为了比较该方法，将测量温度与另外两种方法(红外相机和ESD二极管)进行了关联。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Simultaneous measures of temperature and expansion on electronic compound

In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.

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2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium

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