Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park
{"title":"采用Al/Si衬底制备大面积LED用阳极氧化铝纳米模板","authors":"Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park","doi":"10.1109/OMEMS.2010.5672133","DOIUrl":null,"url":null,"abstract":"Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Preparation of anodic aluminum oxide nano-template using Al/Si substrate for large area LED applications\",\"authors\":\"Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park\",\"doi\":\"10.1109/OMEMS.2010.5672133\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672133\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672133","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Preparation of anodic aluminum oxide nano-template using Al/Si substrate for large area LED applications
Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
