Correlation study between doping technique towards diffusion rate and oxidation rate

This paper is to investigate correlation between doping technique towards diffusion rate and oxide growth rate. There are two types of doping technique that has been investigated such as Solid Source, SS and Spin on Dopant, SOD. Four inches wafers were used to investigate the effects of doping technique towards diffusion rate and oxidation rate. The resistivity of silicon substrate is measured by using 4-point probe while the oxide thickness is measured by an Ellipsometer. From this experiment, it can be concluded that diffusion rate of Solid Source is about 86% better than Spin on Dopand. While the oxide growth of Solid Source, SS is 3.6% better than Spin on Dopant.