铝掺杂氧化锌薄膜的光响应特性

S. S. Shariffudin, M. N. Masri, Abdul Aziz A, M. F. Malek, M. Rusop
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引用次数: 0

摘要

研究了不同铝掺杂浓度对掺杂ZnO薄膜光响应特性的影响。采用溶胶-凝胶浸涂技术在玻璃衬底上制备了铝掺杂ZnO (AZO)薄膜。以单乙醇胺(MEA)为稳定剂,脱水乙酸锌(Zn(CH3COO)2.2H2O)为前驱体,2-甲氧基乙醇为溶剂,硝酸铝(Al(NO3)3.9H2O)为掺杂源,制备了0.4M的AZO溶胶。制备了不同质量百分比掺杂的样品,研究了在黑暗和光照条件下对薄膜电学和光学性能的影响。采用双探头电流-电压(I-V)测量系统(Advantest R6243)对薄膜的电学性能进行了表征。采用紫外-可见-近红外光谱仪对其光学性质进行了研究。在光照条件下,AZO薄膜的电导率比在黑暗条件下高。光学性质表明,薄膜的光学带隙随掺杂浓度的增加而增大。
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Photoresponse characteristics of aluminum doped zinc oxide thin film
The paper investigates the influence of different aluminum doping concentration on the photoresponse characteristics of doped ZnO thin films. Aluminum doped ZnO (AZO) thin films have been prepared by sol-gel dip-coating technique on glass substrates. 0.4M sol of AZO were prepared using monoethanolamine (MEA) as the stabilizer, zinc acetate dehydrate (Zn(CH3COO)2.2H2O) as the precursor, 2-methoxyethanol as solvent and aluminum nitrate nanohydrate (Al(NO3)3.9H2O) as dopant source. Samples with different weight percentage of the dopant were prepared to study the effect to electrical and optical properties of the thin films in dark and under illumination conditions. Electrical properties of thin films were characterized using 2-probe Current-Voltage (I-V) measurement system (Advantest R6243). The optical properties were studied using UV-Vis-NIR spectrometer. The electrical properties of the AZO thin films show higher conductivity under illumination compared to in dark condition. The optical properties show that the optical bandgap of the thin films increases with the increment of the doping concentrations.
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