用于研究共面反电润湿振动传感和能量收集的试验结构

2023 35th International Conference on Microelectronic Test Structure (ICMTS) Pub Date : 2023-03-27 DOI:10.1109/ICMTS55420.2023.10094057

Anotidaishe Moyo, M. W. Shahzad, J. Terry, Stewart Smith, Y. Mita, Yifan Li

{"title":"用于研究共面反电润湿振动传感和能量收集的试验结构","authors":"Anotidaishe Moyo, M. W. Shahzad, J. Terry, Stewart Smith, Y. Mita, Yifan Li","doi":"10.1109/ICMTS55420.2023.10094057","DOIUrl":null,"url":null,"abstract":"Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.","PeriodicalId":275144,"journal":{"name":"2023 35th International Conference on Microelectronic Test Structure (ICMTS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting\",\"authors\":\"Anotidaishe Moyo, M. W. Shahzad, J. Terry, Stewart Smith, Y. Mita, Yifan Li\",\"doi\":\"10.1109/ICMTS55420.2023.10094057\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.\",\"PeriodicalId\":275144,\"journal\":{\"name\":\"2023 35th International Conference on Microelectronic Test Structure (ICMTS)\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 35th International Conference on Microelectronic Test Structure (ICMTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS55420.2023.10094057\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 35th International Conference on Microelectronic Test Structure (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS55420.2023.10094057","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

介质上反电润湿(REWOD)是一种很有前途的低频振动能量收集技术。本研究旨在使用测试结构来表征一种独特的REWOD形式，使用共面电极配置。这种配置允许在系统集成，设备封装和应用程序更好的多功能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.

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2023 35th International Conference on Microelectronic Test Structure (ICMTS)

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