一种观察多晶硅纳米线mosfet阈值电压的实验与分析方法

G. Sheu, Shao-Ming Yang, Aanand, Syed Sarwar Imam, Ming-Jen Fan, S. Lu
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引用次数: 2

摘要

将一种新的基于双积分的模型参数提取方法应用于实验多晶硅纳米线mosfet。实验发现,如果传统方法不能显示纳米线MOSFET的灵敏度取决于阈值电压,则饱和电流可以显示纳米线MOSFET的灵敏度。结果表明,该方法优于以往在饱和模式下利用跨导曲线提取阈值电压的方法。此外,还展示了如何对紧凑模型的Id-Vg特性进行数值评估和检查。显示了器件电流的漏极和栅极偏置依赖关系。我们所提出的模型也适合于硅的数据。实验结果支持本文提出的模型。在饱和区测量漏极电流可以很容易地反映出不同条件下电流水平的变化,但传统的线性区理论很难用于纳米线的灵敏度测试。
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An experimental and analytical method to observe the polysilicon Nanowire mosfet threshold voltage
A new double integration-based method to extract model parameters is applied to experimental polysilicon nanowire MOSFETs. It was experimentally found that the saturation current shows the sensitivity of the Nano-wire MOSFETs if the conventional method fails to show the sensitivity depending upon the threshold voltage of Nano-wire MOSFET. It shows that the present method offers advantage over previous extraction procedure which use trans-conductance curve in the saturation mode, and the threshold voltage is determined by the intercept of curve. In addition to show how compact model for the Id-Vg characteristics are numerically evaluated and examined. The drain and gate bias dependencies of device current are shown. Also the model we proposed fits to the silicon data. Our experimental results support the model which we proposed in this paper. The drain current measured in saturation region can easily show the change in current level at different conditions but the convention theory for the linear region is difficult to do for sensitivity test of Nano-wire.
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