SiGe异质结构和超晶格的性质和器件

K. Wang, R. Karunasiri
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引用次数: 0

摘要

综述了几种成功的在Si上生长Ge/sub -x/ Si/sub - 1-x/伪晶应变层的技术。讨论了影响器件设计和性能的应变层的性质。还讨论了基于这种材料的器件,重点是异质结双极晶体管(hbt)。预测了高增益和高截止频率。其他进展,包括隧道结构、量子阱结构和基于带向超晶格的器件的演示,也被介绍。讨论了单层Ge/sub - m/Si/sub - n/超晶格的生长,布里渊区折叠的概念和准直接带隙的形成。
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Properties and devices of SiGe heterostructures and superlattices
Several successful techniques for growth of pseudomorphic strained Ge/sub x/Si/sub 1-x/ layers on Si are briefly reviewed. The properties of the strained layers that affect the device design and performance are discussed. Devices based on the material are also discussed, with emphasis on heterojunction bipolar transistors (HBTs). High gain and high cutoff frequency has been predicted. Other advances, including the demonstration of tunneling structures, quantum well structures, and devices based on band-aligned superlattices, are presented. The growth of monolayer Ge/sub m/Si/sub n/ superlattices is discussed as well as the concept of Brillouin zone-folding and the formation of quasi-direct bandgaps.<>
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