{"title":"自由空间可控lc -微燃烧光栅光束偏转器研究","authors":"Junbo Yang, Suzhi Xu, Jingjing Zhang, Shengli Chang","doi":"10.1117/12.2181231","DOIUrl":null,"url":null,"abstract":"A liquid crystal (LC) beam deflector with a microblazed grating produced by stepping photolithography and reactive ion etching (RIE) was reported. A homogeneously aligned nematic liquid crystal (NLC) materials are filled inside the microcavity of blazed grating, and sandwiched between two glass plates. An indium tin oxide (ITO) transparent electrode is deposited on it to provide the beam steering capability. Our LC-micro blazed grating device gives a high diffractive efficiency (about 95%) and a controllable large steering angle over 7.2° (for ne) and 1.7° (for no), respectively. It was found that this type of non-mechanical beam steering without any moving parts is ideally suited for applications in optical communication and optical interconnection network.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"396 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on controllable LC-micro blazed grating beam deflector in free space\",\"authors\":\"Junbo Yang, Suzhi Xu, Jingjing Zhang, Shengli Chang\",\"doi\":\"10.1117/12.2181231\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A liquid crystal (LC) beam deflector with a microblazed grating produced by stepping photolithography and reactive ion etching (RIE) was reported. A homogeneously aligned nematic liquid crystal (NLC) materials are filled inside the microcavity of blazed grating, and sandwiched between two glass plates. An indium tin oxide (ITO) transparent electrode is deposited on it to provide the beam steering capability. Our LC-micro blazed grating device gives a high diffractive efficiency (about 95%) and a controllable large steering angle over 7.2° (for ne) and 1.7° (for no), respectively. It was found that this type of non-mechanical beam steering without any moving parts is ideally suited for applications in optical communication and optical interconnection network.\",\"PeriodicalId\":380636,\"journal\":{\"name\":\"Precision Engineering Measurements and Instrumentation\",\"volume\":\"396 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Engineering Measurements and Instrumentation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2181231\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering Measurements and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2181231","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study on controllable LC-micro blazed grating beam deflector in free space
A liquid crystal (LC) beam deflector with a microblazed grating produced by stepping photolithography and reactive ion etching (RIE) was reported. A homogeneously aligned nematic liquid crystal (NLC) materials are filled inside the microcavity of blazed grating, and sandwiched between two glass plates. An indium tin oxide (ITO) transparent electrode is deposited on it to provide the beam steering capability. Our LC-micro blazed grating device gives a high diffractive efficiency (about 95%) and a controllable large steering angle over 7.2° (for ne) and 1.7° (for no), respectively. It was found that this type of non-mechanical beam steering without any moving parts is ideally suited for applications in optical communication and optical interconnection network.
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