工艺参数对MEMS加速度计动态性能的影响

CAS 2010 Proceedings (International Semiconductor Conference) Pub Date : 2010-12-03 DOI:10.1109/SMICND.2010.5650639

C. Comeaga, G. Ionascu, E. Manea, A. Sandu, L. Bogatu, D. Besnea

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引用次数: 4

摘要

本文采用有限元法研究了体积微加工硅压阻式加速度计的力学结构。预测了振动模态(谐振频率)和灵敏度。数值模拟和实验验证的结果指出了制造工艺参数对加速度计性能的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Influence of technological parameters on the dynamic behavior of a MEMS accelerometer

The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.

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CAS 2010 Proceedings (International Semiconductor Conference)

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