40 GHz的薄膜铁电体宽带介电常数测量

N. Orloff, J. Booth, M. Murakami, I. Takeuchi
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引用次数: 1

摘要

我们展示了一种新的实验技术来测量介电薄膜在100 Hz到40 GHz频率范围内的复介电常数。我们应用该技术测定了铁电薄膜(如PbTiO3)在室温下的宽带介电常数。我们讨论了这种频率相关测量在确定铁电薄膜在有限频率下的介电响应的价值。
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Broadband permittivity measurements of thin-film ferroelectrics to 40 GHz
We demonstrate a novel experimental technique to measure the complex permittivity of dielectric thin films over the frequency range from 100 Hz to 40 GHz. We apply this technique to determine the broadband permittivity for ferroelectric thin films such as PbTiO3 at room temperature. We discuss the value of such frequency-dependent measurements for determining the dielectric response of ferroelectric thin films at finite frequencies.
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