Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer
{"title":"p型和n型硅纳米线的电学特性","authors":"Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer","doi":"10.1109/DRC.2004.1367764","DOIUrl":null,"url":null,"abstract":"There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.","PeriodicalId":385948,"journal":{"name":"Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.","volume":"181 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Electrical properties of p- and n-type silicon nanowires\",\"authors\":\"Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer\",\"doi\":\"10.1109/DRC.2004.1367764\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.\",\"PeriodicalId\":385948,\"journal\":{\"name\":\"Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.\",\"volume\":\"181 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DRC.2004.1367764\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2004.1367764","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electrical properties of p- and n-type silicon nanowires
There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.