p型和n型硅纳米线的电学特性

Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer
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引用次数: 1

摘要

半导体纳米线自下而上的集成技术在未来的逻辑、存储和传感器电路中的应用已经引起了人们极大的兴趣。将场效应器件与p型和n型导通通道集成的能力是利用这种技术制造互补逻辑电路必须克服的挑战。在这次演讲中,我们介绍了在无意掺杂、p型和n型硅纳米线(SiNWs)上进行的四点电阻率和栅极相关电导测量的结果。这些结果强调了未来的努力必须解决在气液固生长SiNWs中高p型背景掺杂浓度的来源,以促进n通道器件性能的改善。
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Electrical properties of p- and n-type silicon nanowires
There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.
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