行电场诱导微结构中介电粒子和活细胞的直线运动

G. Fuhr, R. Hagedorn, T. Muller, B. Wagner, W. Benecke
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引用次数: 79

摘要

通过微加工技术获得的微电极排列被发现非常适合于微观颗粒的线性转移,如生物细胞和其他微观尺寸的物体。有效操纵粒子的条件是电极的几何形状,其与粒子的尺寸相对应,并适应电极的电激励(行高频波)。粒子的运动被发现是介电电泳和电荷弛豫过程的叠加,因为它们占主导地位,例如在电介质感应电动机中。通过施加振幅在5到15伏之间的相移矩形脉冲,可以实现数百μ m /s的微粒速度。
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Linear motion of dielectric particles and living cells in microfabricated structures induced by traveling electric fields
Arrangements of microelectrodes as obtained by a microfabrication technique are found to be well suited for a linear transfer of microscopic particles such as biological cells and other objects of microscopic dimensions. The conditions for an effective manipulation of the particles are electrode geometries which correspond to the dimensions of the particle and adapted electrical excitation of the electrodes (traveling high-frequency waves). The motion of particles was found to be a super-position of dielectrophoresis and charge relaxation processes as they are dominant, e.g. in dielectric induction motors. Microparticle velocities of some hundreds mu /s could be achieved by applying phase-shifted rectangular pulses with amplitudes between 5 and 15 volts.<>
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Fabrication of micro-structures using non-planar lithography (NPL) In situ observation and analysis of wet etching process for micro electro-mechanical systems Silicon wafer bonding techniques for assembly of micromechanical elements Microtribology related to MEMS-Concept, measurements, applications Characteristics of an ultra-small biomotor
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