单面沟槽式或双面沟槽式谐振器，由两步或以上的化学蚀刻工艺制造

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI:10.1109/FREQ.2001.956253

Y. Nagaura, Z. Nagaura, K. Nagaura, K. Nagato, K. Emoto, K. Imani, K. Kinoshita, S. Yokomizo, M. Nakazawa

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引用次数: 4

摘要

采用化学蚀刻工艺，成功地制造出了两阶梯形状的单面沟槽型和双面沟槽型石英谐振器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps

Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes.

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Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)

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