H. Inokawa, A. Banerjee, D. Elamaran, H. Satoh, N. Hiromoto
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Impact of Downscaling on Terahertz Antenna-Coupled Bolometers
Scaling trend in the integrated heater and thermistor for terahertz antenna-couple bolometers is analyzed in terms of responsivity and thermal response speed, i.e. cutoff frequency. Two cases where dimensions of the heater and thermistor are changed with and without correlation are discussed, and experimental results for both cases are shown to verify the expected scaling trends, and the prospect for improving the performance by down scaling is given.
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