热电耦合载荷下电迁移和应力集中引起的铜柱凸块开裂破坏

Si Chen, Zhizhe Wang, Bin Zhou, Y. En, Yun Huang, Bin Yao
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引用次数: 0

摘要

选择$2 \乘以10 ^{4}\、\ mathm {A} /cm^{2}$、$2.5 \乘以10 ^{4}\、\ mathm {A} /cm^{2}$和$3 \乘以10 ^{4}\、\ mathm {A} /cm^{2}$三个电流密度水平,分别在$100 ^{\circ}\ mathm {C}$、125 ^{\circ}\ mathm {C}$和$150 ^{\circ}\ mathm {C}$环境温度下对铜柱凸块样品进行电迁移试验。采用扫描电镜(SEM)观察了电迁移后铜柱凸起的微观结构演变和破坏模式。建立了电迁移过程中材料迁移对铜柱凸块力学性能影响的有限元模型。结果表明,较高的电流密度和较高的环境温度会导致铜柱凸点的电迁移速度加快,从而导致焊料IMC中产生大量空腔。在电迁移过程中,这些空腔不断膨胀,导致内嵌层的应力集中越来越明显。该应力集中达到68MPa以上,超过了Cu6 Sn5的断裂强度,这可以部分解释实验中观察到的Cu柱凸起的断裂破坏。
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Cracking failure of Cu pillar bump caused by electromigration and stress concentration under thermo-electric coupling loads
Three current density levels, $2 \times 10 ^{4}\,\mathrm{A} /cm^{2}$, $2.5 \times 10 ^{4}\,\mathrm{A} /cm^{2}$ and $3 \times 10 ^{4}\,\mathrm{A} /cm^{2}$, were selected to conduct the electromigration tests on the Cu pillar bump samples at ambient temperatures of $100 ^{\circ}\mathrm{C}, 125 ^{\circ}\mathrm{C}$ and $150 ^{\circ}\mathrm{C}$ respectively. Scanning electron microscope (SEM) was used to observe the microstructure evolution and failure mode of Cu pillar bumps after electromigration. A finite element model is established to reveal the mechanical property degradation of Cu pillar bump caused by material migration during electromigration. The results show that, higher current density and higher ambient temperature can induce a faster electromigration of Cu pillar bump, thus results in a large number of cavities generate in the solder IMC. These cavities expanded continuously and caused more and more obvious stress concentration in the IMC during the process of electromigration. This stress concentration reached above 68MPa, exceeding the fracture strength of Cu6 Sn5, which can be partly explained the fracture failure of Cu pillar bumps observed in the experiment.
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