{"title":"新型超低R/sub / MBE GaAs MESFET用于高频高温开关模式功率转换器","authors":"K. Shenai, D. Hodge, M. Feuer, J. Cunningham","doi":"10.1109/ISPSD.1994.583684","DOIUrl":null,"url":null,"abstract":"This paper reports on the theoretical and experimental results of novel ultra-low on-resistance (R/sub on/) GaAs MESFET's fabricated using Molecular Beam Epitaxy (MBE). Lateral GaAs MESFET's with drain-source breakdown voltage V/sub DB/>30 V and specific on-state resistance R/sub sp/<0.13 m/spl Omega/-cm/sup 2/ were fabricated using novel refractory metal gate and layered ohmic contact technologies in which all GaAs layers were grown using MBE. The measured R/sub on/ performance is in good agreement with simple calculations made from device design and doping parameters and represents the highest electrical conductivity obtained for a power semiconductor device in this VDB rating. These devices are useful in developing 5 V power supplies with switching frequencies in excess of 100 MHz for application in the next generation of information processing and computing systems.","PeriodicalId":405897,"journal":{"name":"Proceedings of the 6th International Symposium on Power Semiconductor Devices and Ics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1994-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Novel ultralow R/sub on/ MBE GaAs MESFET's for high-frequency high-temperature switched-mode power converter applications\",\"authors\":\"K. Shenai, D. Hodge, M. Feuer, J. Cunningham\",\"doi\":\"10.1109/ISPSD.1994.583684\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports on the theoretical and experimental results of novel ultra-low on-resistance (R/sub on/) GaAs MESFET's fabricated using Molecular Beam Epitaxy (MBE). Lateral GaAs MESFET's with drain-source breakdown voltage V/sub DB/>30 V and specific on-state resistance R/sub sp/<0.13 m/spl Omega/-cm/sup 2/ were fabricated using novel refractory metal gate and layered ohmic contact technologies in which all GaAs layers were grown using MBE. The measured R/sub on/ performance is in good agreement with simple calculations made from device design and doping parameters and represents the highest electrical conductivity obtained for a power semiconductor device in this VDB rating. These devices are useful in developing 5 V power supplies with switching frequencies in excess of 100 MHz for application in the next generation of information processing and computing systems.\",\"PeriodicalId\":405897,\"journal\":{\"name\":\"Proceedings of the 6th International Symposium on Power Semiconductor Devices and Ics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-05-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 6th International Symposium on Power Semiconductor Devices and Ics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISPSD.1994.583684\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 6th International Symposium on Power Semiconductor Devices and Ics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISPSD.1994.583684","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Novel ultralow R/sub on/ MBE GaAs MESFET's for high-frequency high-temperature switched-mode power converter applications
This paper reports on the theoretical and experimental results of novel ultra-low on-resistance (R/sub on/) GaAs MESFET's fabricated using Molecular Beam Epitaxy (MBE). Lateral GaAs MESFET's with drain-source breakdown voltage V/sub DB/>30 V and specific on-state resistance R/sub sp/<0.13 m/spl Omega/-cm/sup 2/ were fabricated using novel refractory metal gate and layered ohmic contact technologies in which all GaAs layers were grown using MBE. The measured R/sub on/ performance is in good agreement with simple calculations made from device design and doping parameters and represents the highest electrical conductivity obtained for a power semiconductor device in this VDB rating. These devices are useful in developing 5 V power supplies with switching frequencies in excess of 100 MHz for application in the next generation of information processing and computing systems.