Reliability of fine-line thick-film and LTCC conductors at high-temperature operation

This paper presents systematic studies of thick-film or LTCC fine-line conductors made with the aid of laser-shaping and operating at temperature up to 400°C. The minimum dimensions i.e. conductive path width and spacings were 50 μm. Such small patterns have been created by laser cutting of fired Au- or PdAg-based conductive films. Laser system equipped with Nd:YAG-laser (beam wavelength of 1064 nm) was applied. Additionally, part of the structures was covered with protective overglaze layer. The geometrical as well as electrical and stability properties in temperature range between 25°C and 400°C were measured and analyzed.