{"title":"聚对二甲苯C的沉积及其在MEMS和医疗设备封装中的密封性表征","authors":"F. Selbmann, M. Baum, M. Wiemer, T. Gessner","doi":"10.1109/NEMS.2016.7758283","DOIUrl":null,"url":null,"abstract":"Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"386 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices\",\"authors\":\"F. Selbmann, M. Baum, M. Wiemer, T. Gessner\",\"doi\":\"10.1109/NEMS.2016.7758283\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.\",\"PeriodicalId\":150449,\"journal\":{\"name\":\"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"386 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2016.7758283\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2016.7758283","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices
Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.
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