纳米结构增强表面声波传感器最优参数的确定

O. Bogdan, A. Orlov, G. Pashkevich, V. Ulianova, Y. Yakimenko, A. Zazerin
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引用次数: 1

摘要

研究了基于ZnO纳米结构的敏感元件在双端口表面声波传感器(SAW)设计中的各种修饰。采用有限元模拟方法研究了ZnO纳米结构的形貌参数(直径和长度)对输出SAW传感器特性的影响。得到了通用的柔性多参数模型,可以对性能参数进行评价。利用该方法可以估计出纳米结构增强SAW传感器设计的最佳参数。
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Optimal parameters determination for nanostructure-enhanced surface acoustic waves sensor
Various modifications of the ZnO nanostructures based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The influence of morphometric parameters (diameter and length) of ZnO nanostructures on output SAW sensor characteristics was investigated by finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for nanostructure-enhanced SAW sensor design could be estimated by the proposed approach.
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