{"title":"自旋涂覆聚酰亚胺薄膜介电特性研究","authors":"L. Matay","doi":"10.1109/ASDAM.2002.1088481","DOIUrl":null,"url":null,"abstract":"Dielectric properties of HTR-3 and PAAC-16 polyimide thin films with thickness ranging from 0.95 to 2.4 /spl mu/m have been measured in the frequency range from 50 kHz to 14 MHz by using a small electrode in MPM system. The frequency dependence of ac conductivity for polyimide HTR-3 and PAAC-16 with thickness of polyimide film about 1.4 /spl mu/m was measured at room temperature. The curves exhibit two dispersive regions in which they had different slope. The dielectric loss and dissipation factor (tan /spl delta/) decrease in the frequency range <400 kHz and increase in the frequency range >400 kHz. With decreasing polyimide film thickness, the dielectric constant decreased.","PeriodicalId":179900,"journal":{"name":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","volume":"110 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Studies of dielectric characteristics of spin-coated polyimide films\",\"authors\":\"L. Matay\",\"doi\":\"10.1109/ASDAM.2002.1088481\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Dielectric properties of HTR-3 and PAAC-16 polyimide thin films with thickness ranging from 0.95 to 2.4 /spl mu/m have been measured in the frequency range from 50 kHz to 14 MHz by using a small electrode in MPM system. The frequency dependence of ac conductivity for polyimide HTR-3 and PAAC-16 with thickness of polyimide film about 1.4 /spl mu/m was measured at room temperature. The curves exhibit two dispersive regions in which they had different slope. The dielectric loss and dissipation factor (tan /spl delta/) decrease in the frequency range <400 kHz and increase in the frequency range >400 kHz. With decreasing polyimide film thickness, the dielectric constant decreased.\",\"PeriodicalId\":179900,\"journal\":{\"name\":\"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem\",\"volume\":\"110 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-12-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASDAM.2002.1088481\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2002.1088481","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Studies of dielectric characteristics of spin-coated polyimide films
Dielectric properties of HTR-3 and PAAC-16 polyimide thin films with thickness ranging from 0.95 to 2.4 /spl mu/m have been measured in the frequency range from 50 kHz to 14 MHz by using a small electrode in MPM system. The frequency dependence of ac conductivity for polyimide HTR-3 and PAAC-16 with thickness of polyimide film about 1.4 /spl mu/m was measured at room temperature. The curves exhibit two dispersive regions in which they had different slope. The dielectric loss and dissipation factor (tan /spl delta/) decrease in the frequency range <400 kHz and increase in the frequency range >400 kHz. With decreasing polyimide film thickness, the dielectric constant decreased.
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