Measurement of parameters of optically transparent films

The possibility of simultaneous measurement of the refractive index and the thickness of optically transparent films in a classical interferometer with a modified illuminator is shown. The illuminator includes a source of coherent and incoherent lighting. Analysis of the correlation and interference fringes makes it possible to simultaneously determine the parameters of the refractive index and thickness for the considered region of the film. The method eliminates errors associated with the need to use different methods for measuring parameters.