{"title":"介面化学与微装置:化学微感测器的潜力与挑战","authors":"B. Mizaikoff, C. Kranz","doi":"10.1109/ASDAM.2002.1088531","DOIUrl":null,"url":null,"abstract":"Recent advances in micro- and nanotechnology determine current trends in the field of chemical sensor technology enabling micro- and nanofabrication of device components and entire sensing systems. However, not all properties of chemical sensing systems necessarily improve with decreasing physical dimensions. Challenges of applying chemical sensors in a real-world environment are discussed and implicit consequences for scaling down chemical sensing systems to the micro- and nanoscale are derived. General aspects of miniaturized chemical sensor technology is contrasted with selected examples elucidating trends in the field of mid-infrared optical sensors and scanning probe tip integrated electrochemical sensing devices.","PeriodicalId":179900,"journal":{"name":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Interfacing chemistry with microdevices: Potential and challenges of chemical microsensors\",\"authors\":\"B. Mizaikoff, C. Kranz\",\"doi\":\"10.1109/ASDAM.2002.1088531\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recent advances in micro- and nanotechnology determine current trends in the field of chemical sensor technology enabling micro- and nanofabrication of device components and entire sensing systems. However, not all properties of chemical sensing systems necessarily improve with decreasing physical dimensions. Challenges of applying chemical sensors in a real-world environment are discussed and implicit consequences for scaling down chemical sensing systems to the micro- and nanoscale are derived. General aspects of miniaturized chemical sensor technology is contrasted with selected examples elucidating trends in the field of mid-infrared optical sensors and scanning probe tip integrated electrochemical sensing devices.\",\"PeriodicalId\":179900,\"journal\":{\"name\":\"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-12-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASDAM.2002.1088531\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2002.1088531","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Interfacing chemistry with microdevices: Potential and challenges of chemical microsensors
Recent advances in micro- and nanotechnology determine current trends in the field of chemical sensor technology enabling micro- and nanofabrication of device components and entire sensing systems. However, not all properties of chemical sensing systems necessarily improve with decreasing physical dimensions. Challenges of applying chemical sensors in a real-world environment are discussed and implicit consequences for scaling down chemical sensing systems to the micro- and nanoscale are derived. General aspects of miniaturized chemical sensor technology is contrasted with selected examples elucidating trends in the field of mid-infrared optical sensors and scanning probe tip integrated electrochemical sensing devices.