带AlAs缓冲层的GaAs mesfet的高温器件特性

G. Trombley, C. Havasy, R.G.-H. Lee, R. Reston, C. Ito, T. Jenkins
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引用次数: 1

摘要

高温电子(HTE)是汽车、飞机、航天和其他暴露在极端温度下的应用所必需的。许多HTE的研究都集中在非常宽的带隙半导体(>2.5eV)上,如Sic, GaN和金刚石[1],[2]。然而,GaAs(一种更成熟的技术)也显示出高温应用(<400”C)的前景,因为它提供了相当宽的带隙(1.42eV)和高迁移率。不幸的是,当GaAs mesfet在高于250°C的温度下进行评估时,大的亚阈值漏极电流会通过降低开关比和增加输出电导来降低器件性能[3]。一个潜在的解决方案的问题,大亚阈值电流探讨在本调查。通过在GaAs MESFET的有源通道下加入未掺杂的AMs缓冲层,可以在高达350°C的温度下观察到亚阈值电流的显着降低。
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High temperature device characterstics of GaAs MESFETs fabricated with an AlAs buffer layer
High temperature electronics (HTE) are required for automotive, aircraft, space and other applications exposed to thermal extremes. Many HTE efforts have focused on very wide bandgap semiconductors (>2.5eV) such as Sic, GaN and diamond [l], [2]. However, GaAs (a more mature technology) also shows promise for high temperature applications (<400"C) because it provides a reasonably wide bandgap (1.42eV) with high mobility. Unfortunately, when GaAs MESFETs are evaluated at temperatures greater than 250°C large subthreshold drain currents degrade device performance by reducing switching ratios and increasing output conductances [3]. A potential solution to the problem of large subthreshold currents is explored in this investigation. By incorporating an undoped AMs buffer layer beneath the active channel of a GaAs MESFET, a marked reduction in subthreshold current is observed at temperatures as high as 350°C.
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