{"title":"双轴扫描微镜高压全差动驱动器的设计","authors":"E. Volpi, L. Fanucci, F. D'Ascoli","doi":"10.1109/RME.2009.5201315","DOIUrl":null,"url":null,"abstract":"The design of a high voltage fully differential driver in a 0.18 µm Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror's higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations performed with an equivalent electrical model of the micromirror are presented.","PeriodicalId":245992,"journal":{"name":"2009 Ph.D. Research in Microelectronics and Electronics","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Design of a high voltage fully differential driver for a double axis scanning micromirror\",\"authors\":\"E. Volpi, L. Fanucci, F. D'Ascoli\",\"doi\":\"10.1109/RME.2009.5201315\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design of a high voltage fully differential driver in a 0.18 µm Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror's higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations performed with an equivalent electrical model of the micromirror are presented.\",\"PeriodicalId\":245992,\"journal\":{\"name\":\"2009 Ph.D. Research in Microelectronics and Electronics\",\"volume\":\"71 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-07-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 Ph.D. Research in Microelectronics and Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RME.2009.5201315\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Ph.D. Research in Microelectronics and Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RME.2009.5201315","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design of a high voltage fully differential driver for a double axis scanning micromirror
The design of a high voltage fully differential driver in a 0.18 µm Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror's higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations performed with an equivalent electrical model of the micromirror are presented.
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