J. Hassan, Xing Yan, Jiangbo Wu, Dingwei Chen, Sohail Muhammad, Abalo E. Eyouemou, Yongjun Huang, G. Wen
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引用次数: 2
摘要
微机电系统(MEMS)技术使陀螺仪具有体积小、功耗低、可靠性高、易于集成等特点,可用于测量运动物体的角速度。为了优化传感性能,我们设计了一种新型的基于光子晶体光机械腔的微陀螺仪。根据建模结果,所提出的微陀螺仪具有以下功能特征:工作带宽为10 Hz,机械灵敏度$d y / d \Omega\ \text { of }\ 0.340 \mathrm{~nm} /(^\circ / \mathrm{s})$,光机械灵敏度$d \omega_{\text {sense}} / d \Omega$为$2.09 \mathrm{kHz} /(^\circ / \mathrm{s})$,测量范围$\pm 33.12(^\circ / \mathrm{s})$。
Design of Optical Gyroscope Based on the Cavity Optomechanics Structure
Micro-electromechanical systems (MEMS) technologies allow the reduction of mass and manufacture of gyroscopes, which demonstrate the features of small volume, low consumption of power, high trustiness, and easy integration with many applications, as a device for measuring the angular velocity of moving objects. In order to optimize the sensing performance, we designed a new model of a micro-gyroscope based on a photonic crystal optomechanical cavity. The proposed micro-gyroscope has the following functional features, according to modeling results: operating bandwidth 10 Hz, mechanical sensitivity $d y / d \Omega\ \text { of }\ 0.340 \mathrm{~nm} /(^\circ / \mathrm{s})$, optomechanical sensitivity $d \omega_{\text {sense}} / d \Omega$ is $2.09 \mathrm{kHz} /(^\circ / \mathrm{s})$, and measurement range is $\pm 33.12(^\circ / \mathrm{s})$.