Dielectric imaging and its frequency dependence of dielectric device using non-contact state microwave probe

The frequency variable microwave microscope was developed to evaluate the dielectric permittivity distribution for dielectrics. The dielectric permittivity and dielectric loss for multi-layer ceramics capacitor were estimated from their microwave reflection intensities at the minimum intensity points. The two dimensional dielectric permittivity image for the cross section of multi - layer ceramic capacitor was obtained clearly. The spatial resolution was attained to be about 1¿m experimentally. The measured frequency dependence of dielectric permittivity and dielectric loss for multi - layer ceramics capacitor were accordance with the low frequency dielectric spectra measured by a RF impedance analyzer.