卷起的InGaAs/GaAs量子点微型和纳米管激光器

Z. Mi, F. Li
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摘要

最近,当相干应变半导体双分子层选择性地从基底上释放时形成的卷起半导体管已经成为实现高性能光学微纳米腔器件的一种有前途的技术[1-6]。结合自顶向下和自底向上制造工艺的优点,这种方法为实现半导体微纳米管结构提供了非凡的灵活性,这些结构具有外延光滑的表面,并且使用单个光刻步骤可以很好地控制直径和壁厚。然而,迄今为止,这种管结构中的激光尚未得到证实。在此背景下,我们对卷成微纳米管的制备和表征进行了详细的研究,并结合了自组织InGaAs/GaAs量子点作为增益介质。我们第一次实现了在室温下在卷起的半导体管中进行激光发射。该器件具有超低阈值功率(~ 4 μW),本征激光线宽为~ 0.2 ~ 0.3 nm,电场平行于管表面呈线极化的特点。
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Rolled-up InGaAs/GaAs quantum dot micro- and nanotube lasers
Recently, rolled-up semiconductor tubes, formed when a coherently strained semiconductor bilayer is selectively released from the host substrate, have emerged as a promising technique to realize high performance optical micro and nanocavity devices [1–6]. Combining the advantages of both top-down and bottom-up fabrication processes, this approach offers an exceptional flexibility for achieving semiconductor micro- and nanotube structures with an epitaxially smooth surface and well controlled diameters and wall thicknesses using a single photolithography step. However, lasing in such tube structures has hitherto not been demonstrated. In this context, we have performed a detailed investigation of the fabrication and characterization of rolled-up micro- and nanotubes, with the incorporation of self-organized InGaAs/GaAs quantum dots as the gain media. We have achieved, for the first time, lasing in rolled-up semiconductor tubes at room temperature. The devices are characterized an ultralow threshold power (~ 4 μW), an intrinsic lasing linewidth of ~ 0.2–0.3 nm, and a linear polarization with the electric field parallel to the tube surface.
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