微系统自顶向下设计中参数化有限元模型自动转换为cad布局格式

M. Lang, D. David, M. Glesner
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引用次数: 6

摘要

提出了一种将用于有限元模拟的实体模型转换为CAD环境中使用的不同布局格式的工具。在给定的扩展商用CMOS工艺中,制造微元件和系统所需的所有层都由该工具自动生成。从加速度传感器开始,描述了这种转换器在具有参数组件的微系统的自顶向下设计中的应用。
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Automatic transfer of parametric FEM models into CAD-layout formats for top-down design of microsystems
A tool for the transfer of solid models used for FEM simulations into different layout formats used by CAD environments is presented. All necessary layers for the fabrication of microcomponents and systems in a given extended commercial CMOS process are generated automatically by this tool. Starting with an acceleration sensor the use of this translator for an application in the top-down design of microsystems with parametric components is described.
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