不同方法获得的铁电薄膜的电容

Huadong Li, G. Subramanyam, Jiadong Wang
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引用次数: 2

摘要

薄膜铁电电容可通过两种方法获得。由其滞回线导数得到的电容与施加的大信号有关。用小的外加交流信号和缓慢变化的直流偏置直接测量电容与小信号电路分析有关。本文研究了两种电容之间的关系。测量结果表明,用第一种方法得到的C-V曲线具有更清晰的峰值和更高的峰值。建立了将Pb (Zr, Ti) O3 (PZT)的极化分为线性极化和开关极化的模型,分析了其机理。
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Capacitance of thin Ferroelectric films obtained with different methods
Thin film Ferroelectric capacitance can be obtained with two methods. Capacitance obtained by the derivative of its hysteresis loop is related to large applied signal. Capacitance measured directly with small applied alternate current signal together with slow changing dc bias is related to small signal circuit analysis. This paper investigated the relationship between the two types of capacitance. Measurements show that C-V curves obtained with the first method have much sharper peaks and higher peak values. A model, which divides the polarization of Pb (Zr, Ti) O3 (PZT) into linear polarization and switching polarization, was utilized to analyze the mechanism.
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