石墨烯器件的制备、问题与展望

CAS 2010 Proceedings (International Semiconductor Conference) Pub Date : 2010-12-03 DOI:10.1109/SMICND.2010.5650325

G. Deligeorgis, G. Konstantinidis, M. Dragoman, R. Plana

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引用次数: 2

摘要

石墨烯基器件自6年前被分离出来以来，已经发表了大量的文献，然而，加工问题和晶圆尺寸材料的可用性已被证明是石墨烯器件制造中最苛刻的任务。这项工作的重点是与实现基于石墨烯的器件有关的一些主要技术问题。简要介绍和讨论了解决方案和当前的技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication of graphene devices, issues and prospects

Graphene based devices have seen an enormous amount of published literature since its isolation 6 years ago, however processing issues and wafer size material availability have proven to be the most demanding tasks in fabrication of graphene devices. This work focuses on some of the main technological issues relating to realization of graphene based devices. Solutions and current techniques are shortly presented and discussed.

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CAS 2010 Proceedings (International Semiconductor Conference)

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