{"title":"一种非平面基板MEMS制造技术","authors":"W.J. Li, J. Mai, Chih-Ming Ho","doi":"10.1109/MEMSYS.1998.659766","DOIUrl":null,"url":null,"abstract":"The integration of MEMS sensors, actuators, and IC devices onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation structures onto a cylindrical surface. This novel technology includes the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of <5 /spl mu/m is possible for structures on the surface of a 2\" (5.08 cm) long cylinder with a diameter of 1.25\" (3.175 cm). This paper describes the procedures developed to fabricate sacrificially release micro structures onto a cylindrical surface. The performance of some micro thermal actuators and shear stress sensors on a quartz cylindrical substrate are also presented.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"82 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"A MEMS fabrication technique for non-planar substrates\",\"authors\":\"W.J. Li, J. Mai, Chih-Ming Ho\",\"doi\":\"10.1109/MEMSYS.1998.659766\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The integration of MEMS sensors, actuators, and IC devices onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation structures onto a cylindrical surface. This novel technology includes the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of <5 /spl mu/m is possible for structures on the surface of a 2\\\" (5.08 cm) long cylinder with a diameter of 1.25\\\" (3.175 cm). This paper describes the procedures developed to fabricate sacrificially release micro structures onto a cylindrical surface. The performance of some micro thermal actuators and shear stress sensors on a quartz cylindrical substrate are also presented.\",\"PeriodicalId\":340972,\"journal\":{\"name\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"volume\":\"82 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1998.659766\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659766","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8

摘要

将MEMS传感器、致动器和集成电路器件集成到宏观机械部件上是实现智能机械结构的关键技术。目前由MEMS/IC工业提供的平面制造方法限制了将微器件集成到轮廓(非平面)机械结构上的可能性。我们已经开发了一种光刻技术,可以直接在圆柱形表面上制造微米级的传感和驱动结构。这项新技术包括开发柔性掩模、光刻胶喷涂技术和定制对准系统。结果表明,对于直径为1.25“(3.175 cm)、长2”(5.08 cm)的圆柱体表面的结构,线分辨率<5 /spl mu/m是可能的。本文介绍了在圆柱表面上制备牺牲释放微结构的方法。介绍了石英圆柱基板上的微热致动器和剪应力传感器的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
A MEMS fabrication technique for non-planar substrates
The integration of MEMS sensors, actuators, and IC devices onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation structures onto a cylindrical surface. This novel technology includes the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of <5 /spl mu/m is possible for structures on the surface of a 2" (5.08 cm) long cylinder with a diameter of 1.25" (3.175 cm). This paper describes the procedures developed to fabricate sacrificially release micro structures onto a cylindrical surface. The performance of some micro thermal actuators and shear stress sensors on a quartz cylindrical substrate are also presented.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Micro force sensor for intravascular neurosurgery and in vivo experiment Laser display technology A silicon IR-source and CO/sub 2/-chamber for CO/sub 2/ measurements Design and fabrication of a novel integrated floating-electrode-"electret"-microphone (FFEM) Microfabrication and parallel operation of 5/spl times/5 2D AFM cantilever arrays for data storage and imaging
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1