金属包覆聚合物球(MPS)互连热机械可靠性分析

R. Hamou, D. N. Wright, Astrid-Sofie B. Vardøy, M. Haupt, S. Helland, H. Kristiansen, M. Taklo
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引用次数: 0

摘要

在这项研究中,我们探索了基于直径为30 μm的金属涂层聚合物球(MPS)的芯片/衬底BGA互连的热机械应力分布。通过沉积和烧结银纳米颗粒悬浮液,芯片与MPS的玻璃基板的结合得到,该悬浮液形成半月板,用于缩颈和MPS与衬垫的金属结合。截留高度由球直径决定,因此管颈和MPS涂层被认为是该系统的关键参数。模拟研究的重点是改变颈部形状和尺寸以及MPS涂层厚度。采用带proony级数的广义Maxwell模型,将聚合物岩心作为粘弹性材料进行建模。分析了热应力和应变随温度和确定的关键参数的变化规律。此外,还对结构的单MPS和SEM图像进行了剪切试验测量,以揭示这种新互连技术的可行性。
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Analyzing thermo-mechanical reliability of an interconnect based on metal coated polymer spheres (MPS)
In this study, we explore the thermo-mechanical stress distribution of a chip/substrate BGA interconnect based on metal coated polymer spheres (MPS) of 30 μm diameter. The bonding of the chip to a glass substrate with MPS is obtained by deposition and sintering of a silver nanoparticle suspension that forms a menisci needed for necking and metallic bonding of the MPS towards pads. The stand-off height is determined by the ball diameter, thus the necks and the MPS coating are considered to be the critical parameters of the system. The simulation study is focused on varying the shape and the size of the neck and the MPS coating thickness. The polymer core is modeled as a viscoelastic material using generalized Maxwell model with Prony series. The distribution of the relaxed thermal stress and strain within the MPS coating and necks is analyzed as a function of temperature and the identified critical parameters. Moreover, shear test measurements of single MPS and SEM images of the structures are presented and discussed, in order to expose the feasibility of this new interconnect technology.
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