金属纳米光栅相移对等离子体MSM光电探测器的影响

N. Das, A. Karar, C. Tan, K. Alameh, Y. T. Lee
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引用次数: 2

摘要

本文采用时域有限差分(FDTD)方法模拟了采用相移金属纳米光栅的等离子体金属-半导体-金属光电探测器(MSM-PD)结构的光吸收增强。msm - pd的金属指具有适当的蚀刻深度,以最大限度地通过等离子体效应吸收光进入亚波长孔径。仿真结果表明,纳米光栅相移会使光吸收增强最大的波长发生红移,并且纳米光栅沟槽形状和纳米光栅相移的共同作用会使光吸收增强降低50%。
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Impact of metal nano-grating phase-shift on plasmonic MSM photodetectors
In this paper, finite difference time-domain (FDTD) method is used to simulate the light absorption enhancement in a plasmonic metal-semiconductor-metal photodetector (MSM-PD) structure employing a metal nano-grating with phase-shifts. The metal fingers of the MSM-PDs are etched with appropriate depths to maximize light absorption through plasmonic effects into a subwavelength aperture. Simulation results show that the nano-grating phase-shift red-shifts the wavelength at which the light absorption enhancement maximum, and that the combined effects of the nano-grating groove shape and the nano-grating phase-shift, degrade the light absorption enhancement by up to 50%.
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