I. Mateescu, B. Capelle, J. Détaint, L. Dumitrache
{"title":"质量加载效应对谐振腔参数影响的x射线形貌研究","authors":"I. Mateescu, B. Capelle, J. Détaint, L. Dumitrache","doi":"10.1109/FREQ.2001.956349","DOIUrl":null,"url":null,"abstract":"In this paper the results of electrical measurements of the mass-loading influence on AT-cut quartz resonator parameters are compared with those obtained by X-ray topography analysis of the same resonators. Based on the Ballato's transmission-line analogs of the trapped-energy resonators vibrating in thickness-shear mode, the mass-loading effect on resonator characteristics was studied and the effective mass-loading, motional inductance and quality factor of quartz resonators were computed. X-ray topography measurements were performed by transmission diffraction using the synchrotron radiation. Sawyer plan-parallel polished AT quartz resonators with 14 mm diameter, 5 MHz frequency, Au electrodes with various structures, diameters and thickness were used in experiments. The results of the X-ray topography investigations are in agreement with the previous ones obtained by electrical measurements.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"X-ray topography studies on the influence of the mass-loading effect on resonator parameters\",\"authors\":\"I. Mateescu, B. Capelle, J. Détaint, L. Dumitrache\",\"doi\":\"10.1109/FREQ.2001.956349\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper the results of electrical measurements of the mass-loading influence on AT-cut quartz resonator parameters are compared with those obtained by X-ray topography analysis of the same resonators. Based on the Ballato's transmission-line analogs of the trapped-energy resonators vibrating in thickness-shear mode, the mass-loading effect on resonator characteristics was studied and the effective mass-loading, motional inductance and quality factor of quartz resonators were computed. X-ray topography measurements were performed by transmission diffraction using the synchrotron radiation. Sawyer plan-parallel polished AT quartz resonators with 14 mm diameter, 5 MHz frequency, Au electrodes with various structures, diameters and thickness were used in experiments. The results of the X-ray topography investigations are in agreement with the previous ones obtained by electrical measurements.\",\"PeriodicalId\":369101,\"journal\":{\"name\":\"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.2001.956349\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2001.956349","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
X-ray topography studies on the influence of the mass-loading effect on resonator parameters
In this paper the results of electrical measurements of the mass-loading influence on AT-cut quartz resonator parameters are compared with those obtained by X-ray topography analysis of the same resonators. Based on the Ballato's transmission-line analogs of the trapped-energy resonators vibrating in thickness-shear mode, the mass-loading effect on resonator characteristics was studied and the effective mass-loading, motional inductance and quality factor of quartz resonators were computed. X-ray topography measurements were performed by transmission diffraction using the synchrotron radiation. Sawyer plan-parallel polished AT quartz resonators with 14 mm diameter, 5 MHz frequency, Au electrodes with various structures, diameters and thickness were used in experiments. The results of the X-ray topography investigations are in agreement with the previous ones obtained by electrical measurements.
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