使用PiezoMUMPS技术设计和测试谐振器

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2014-04-01 DOI:10.1109/DTIP.2014.7056666

J. Pons-Nin, S. Gorreta, M. Domínguez, E. Blokhina, D. O'Connell, O. Feely

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引用次数: 10

摘要

本文介绍了用新的PiezoMUMPS工艺制备的器件的初步结果。由于这些器件将在基于脉冲数字振荡器的应用中用作谐振器，因此我们通过模拟和测量分析了可以激发和检测的机械振动模式。我们还介绍了用于压电MEMS的PDO的特定版本。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and test of resonators using PiezoMUMPS technology

This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.

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2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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